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Updated: Jun 3, 2026

Laser-induced Forward Transfer for Flip-chip Packaging of Single Dies
Published on: March 20, 2015
Intra-cavity patterning for mode control in 1.3 μm coupled VCSEL arrays
Lukas Mutter1, Benjamin Dwir, Andrei Caliman
1Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratory of Physics of Nanostructures, CH 1015 Lausanne, Switzerland.
Abstract:
We report coupled VCSEL arrays, emitting at 1.3 μm wavelength, in which both the optical gain/loss and refractive index distributions were defined on different vertical layers. The arrays were electrically pumped through a patterned tunnel junction, whereas the array pixels were realized by intra-cavity patterning using sub-wavelength air gaps. Stable oscillations in coupled modes were evidenced for 2x2 array structures, from threshold current up to thermal roll-over, using spectrally resolved field pattern analysis.
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