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Novel evanescent-coupled germanium electro-absorption modulator featuring monolithic integration with germanium p-i-n
Andy Eu-Jin Lim1, Tsung-Yang Liow, Fang Qing
1Institute of Microelectronics, Agency for Science, Technology & Research (A*STAR), 11 Science Park Road, 117685 Singapore. limej@ime.a-star.edu.sg
Abstract:
We report a novel evanescent-coupled germanium (Ge) electro-absorption (EA) modulator with a small active area of 16 μm2 giving an extinction ratio of at least 10 dB for a wavelength range of 1580-1610 nm. The modulation efficiency of the modulator at this wavelength range was ~2 dB/V. In addition, monolithic integration of both evanescent-coupled Ge EA modulator and Ge p-i-n photodetector is demonstrated for the first time.
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