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Deassociate the initial temporal phase deviation provided by photoelastic modulator for stroboscopic illumination

Hsiu-Ming Tsai1, Chih-Wei Chen, Tsung-Han Tsai

  • 1Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, 1001 University Road, Tin ka-ping Photonics Center, Hsinchu 30010, Taiwan.

The Review of Scientific Instruments
|April 5, 2011
PubMed
Summary

This study introduces a novel five-phase method for photoelastic modulated ellipsometry, improving imaging speed and eliminating initial phase calibration. This technique enables faster, accurate thin-film analysis using polarization modulation imaging ellipsometry.

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Area of Science:

  • Optics and Photonics
  • Materials Science
  • Surface Science

Background:

  • Photoelastic modulated ellipsometry is a powerful technique for thin-film characterization.
  • Traditional methods using charge-coupled device cameras suffer from slow imaging processing, especially with stroboscopic illumination.
  • Initial phase calibration can be a complex and time-consuming step.

Purpose of the Study:

  • To develop a faster imaging method for polarization modulated imaging ellipsometry.
  • To eliminate the need for initial phase calibration in photoelastic modulated ellipsometry.
  • To enable accurate thin-film analysis with improved processing speeds.

Main Methods:

  • Implemented a five-temporal-phase measurement strategy instead of the conventional four.
  • Utilized stroboscopic illumination synchronized with the fifth phase to solve the initial phase of the photoelastic modulator.
  • Performed intensity measurements at five specific temporal phases to derive ellipsometric parameters.

Main Results:

  • Successfully demonstrated a method to determine the initial phase without prior calibration.
  • Verified the algorithm by analyzing intensity data from a SiO(2)/Si thin film.
  • Achieved two-dimensional distribution mapping of the SiO(2)/Si thin film using five stroboscopic illuminations.

Conclusions:

  • The proposed five-phase method significantly enhances the imaging speed of polarization modulated imaging ellipsometry.
  • This approach overcomes the limitations of slow charge-coupled device camera processing.
  • It offers a robust and calibration-free solution for accurate thin-film characterization and imaging.