Optimization of coating uniformity in an ion beam sputtering system using a modified planetary rotation method.
Mark Gross1, Svetlana Dligatch, Anatoli Chtanov
1Commonwealth Scientific and Industrial Research Organization Division of Materials Science and Engineering, Lindfield, NSW, Australia.
Applied Optics
|April 5, 2011
Summary
A new planetary rotation system improves optical coating uniformity on large substrates using an ion beam sputter coater. This advanced system achieves high uniformity without masking, crucial for precision optical applications.
Area of Science:
- Materials Science
- Optical Engineering
- Thin Film Deposition
Background:
- Achieving uniform optical coatings on large substrates is challenging.
- Traditional methods often require masking or complex adjustments.
Purpose of the Study:
- To develop a modified planetary rotation system for enhanced optical coating uniformity.
- To improve the precision of optical coatings in ion beam sputter coating.
Main Methods:
- A modified planetary rotation system was designed for an ion beam sputter coater.
- The system allows the sun gear to rotate, enabling complex substrate motions.
- Substrate platens were moved between two fixed positions for averaging distributions.
Main Results:
- High uniformity optical coatings were achieved on 400 mm diameter substrates.
- A peak-to-valley radial uniformity of approximately 0.15% (0.07% rms) was obtained.
- Excellent uniformity was achieved without the need for masking.
Conclusions:
- The modified planetary rotation system significantly enhances optical coating uniformity.
- This system offers a viable solution for producing high-quality optical coatings on large substrates.
- The method is effective for single-layer films and potentially for multilayer coatings.
