Heterodyne grating interferometer based on a quasi-common-optical-path configuration for a two-degrees-of-freedom

Ju-Yi Lee1, Hung-Lin Hsieh, Gilles Lerondel

  • 1Institute of Opto-Mechatronics Engineering, National Central University, Jhongli City, Taoyuan County, Taiwan.

Applied Optics
|April 5, 2011
PubMed

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