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Updated: Jun 2, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Performance of conformal guided mode resonance filters
Aaron T Cannistra1, Menelaos K Poutous, Eric G Johnson
1Center for Optoelectronics and Optical Communications, Department of Physics and Optical Science, University of North Carolina at Charlotte, 9201 University City Boulevard, Charlotte, North Carolina 28223, USA.
Abstract:
Guided mode resonance (GMR) filters are highly functional micro-optics capable of narrowband spectral filtering. GMR devices have previously been demonstrated on flat substrates using a wide range of materials and configurations. In this Letter, we apply a soft lithographic technique followed by the deposition of dielectric layers to generate GMR filters on a concave lens surface. Resonances of the resulting conformal GMR filters are experimentally measured and characterized, and the results are compared to the performance of similar GMR filters fabricated on flat surfaces.
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