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Updated: Jun 2, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Video-rate laser Doppler vibrometry by heterodyne holography
Benjamin Samson1, Frédéric Verpillat, Michel Gross
1Institut Langevin, Fondation Pierre-Gilles de Gennes, Centre National de la Recherche Scientifique, UMR 7587, Institut National de la Santé et de la Recherche Médicale (INSERM) U 979, Université Pierre et Marie Curie (UPMC), Université Paris 7, École Supérieure de Physique et de Chimie Industrielles, 10 rue Vauquelin, 75005 Paris, France.
Abstract:
We report a demonstration video-rate heterodyne holography in off-axis configuration. Reconstruction and display of a one megapixel hologram is achieved at 24 frames per second, with a graphics processing unit. Our claims are validated with real-time screening of steady-state vibration amplitudes in a wide-field, noncontact vibrometry experiment.
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