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Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications
Published on: April 21, 2016
Ultrasensitive protein detection using lithographically defined Si multi-nanowire field effect transistors
Ruhai Tian1, Suresh Regonda, Jinming Gao
1Department of Electrical Engineering, University of Texas at Dallas, Richardson, 75080, USA.
Lab on a Chip
|April 21, 2011
Summary
Low-doped silicon multi-nanowire field effect transistors achieve high ON/OFF ratios and stability for sensitive pH and protein detection. These advanced nanowire sensors offer improved uniformity and reliability in biological applications.
Area of Science:
- Materials Science
- Nanotechnology
- Electrical Engineering
Background:
- Silicon nanowire field-effect transistors (FETs) are promising for biosensing.
- Improving device uniformity, stability, and sensitivity remains a challenge.
Purpose of the Study:
- To fabricate and characterize low-doped silicon multi-nanowire FETs for enhanced biosensing performance.
- To investigate the impact of multi-nanowire architecture and surface modifications on device characteristics.
Main Methods:
- Fabrication of silicon multi-nanowire FETs using lithographic semiconductor processes.
- Evaluation of device performance including ON/OFF ratio and subthreshold swing.
- Assessment of device stability in buffer solutions with surface silanization and solution gate biasing.
- Demonstration of pH sensing and selective detection of bovine serum albumin (BSA).
Main Results:
- Achieved high ON/OFF ratio (>10^7) and low subthreshold swing (60-120 mV/dec).
- Multi-nanowire configuration improved device uniformity and stability compared to single nanowires.
- Surface silanization and solution gate biasing further enhanced device stability.
- Demonstrated linear pH sensing (range 2-9) and selective BSA detection at 0.1 fM.
Conclusions:
- Low-doped silicon multi-nanowire FETs offer a robust platform for high-performance biosensing.
- The developed devices exhibit excellent sensitivity, selectivity, and stability for biological analytes.
- These findings pave the way for advanced point-of-care diagnostic devices.
