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A dynamic linearization concept for piezoelectric actuators
Giovanni Biancuzzi1, Daniel Haller, Thomas Lemke
1Laboratory for Design of Microsystems at IMTEK, Department of Microsystems Engineering, University of Freiburg, Freiburg im Breisgau, Germany. Giovanni.Biancuzzi@imtek.de
Abstract:
We present a linearization circuit based on a capacitive Wheatstone bridge that is able to set a desired polarization in a piezoactuator. The system is meant to be used for dynamic actuation in a broad frequency range. A general nonlinear model for piezoactuators is presented in which two nonlinear sub-systems are cascaded: the electric-field-to-polarization (E-P) and the polarization-to-strain (P-x) blocks. The inversion of the latter sub-system in combination with the linearization bridge results in a reduction of up to 19 dB of the harmonic distortion of the actuator's mechanical displacement.
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