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Updated: Jun 2, 2026

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
Published on: February 27, 2013
An innovative technique to simply fabricate ZrO₂-HA-TiO₂ nanostructured layers
F Samanipour1, M R Bayati, F Golestani-Fard
1School of Metallurgy and Materials Engineering, Iran University of Science and Technology, Tehran, Iran.
Abstract:
For the first time, ZrO₂-HA-TiO₂ layers were synthesized through EPD-Enhanced MAO (EEMAO) technique in only one step where no supplementary treatment was required. SEM, XRD, EDX, and XPS techniques were employed to propose a correlation between the growth parameters and the physical and chemical properties of the layers. The layers revealed a porous structure where applying higher voltages and/or utilizing higher concentrated electrolytes resulted in formation of wider pores and increasing the zirconium concentration in the layers; meanwhile, prolonging the growth time had the same effects. The layers mainly consisted of anatase, hydroxyapatite, monoclinic ZrO₂, and tetragonal ZrO₂ phases. Increasing the voltage, electrolyte concentration, and time, hydroxyapatite as well as tetragonal ZrO₂ was decomposed to α-TCP, monoclinic ZrO₂, and ZrO. The nanosized zirconia particles (d = 20-60 nm) were further accumulated on the vicinity of the layers when thicker electrolytes were utilized or higher voltages were applied. Emphasizing on the chemical and electrochemical foundations, a probable formation mechanism was finally put forward.
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