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Updated: Jun 2, 2026

Micro/Nano-scale Strain Distribution Measurement from Sampling Moiré Fringes
06:56

Micro/Nano-scale Strain Distribution Measurement from Sampling Moiré Fringes

Published on: May 23, 2017

A micro-optical modulation spectroscopy technique for local strain measurement

H Chouaib1, M E Murtagh, P V Kelly

  • 1Optical Metrology Innovations Ltd., 2200 Cork Airport Business Park, Cork Airport, Co. Cork, Ireland. houssam.chouaib@kla-tencor.com

The Review of Scientific Instruments
|May 3, 2011
PubMed

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