Shedding light on axial stress effect on resonance frequencies of nanocantilevers

Valerio Pini1, Javier Tamayo, Eduardo Gil-Santos

  • 1Instituto de Microelectrónica de Madrid, CSIC, Isaac Newton 8 (PTM), Tres Cantos, 28760 Madrid, Spain.

ACS Nano
|May 11, 2011
PubMed

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