Paper-based piezoresistive MEMS sensors

Area of Science:

• Materials Science
• Mechanical Engineering
• Sensor Technology

Background:

• Traditional microelectromechanical systems (MEMS) sensors often require complex fabrication and expensive materials.
• There is a need for low-cost, disposable, and easily manufactured sensing devices.

Purpose of the Study:

• To develop novel MEMS force sensors utilizing paper as the primary structural material.
• To explore the piezoresistive effect in conductive materials patterned on paper substrates for force sensing.
• To demonstrate the application of these sensors in characterizing material properties and developing a paper-based balance.

Main Methods:

• Fabrication of paper-based MEMS force sensors using conductive materials and a paper substrate.
• Utilizing the piezoresistive effect for force transduction.
• Folding paper into 3D structures to enhance sensor stiffness.
• Characterizing sensor performance including resolution, measurement range, and sensitivity.
• Applying the sensors to soft material mechanical property analysis and balance development.

Main Results:

• Successfully developed inexpensive (∼$0.04/device), lightweight, and disposable paper-based MEMS force sensors.
• Achieved moderate sensor performance: resolution of 120 μN, measurement range of ±16 mN, and sensitivity of 0.84 mV mN⁻¹.
• Demonstrated sensor application in soft material characterization and developed a paper-based balance with a 15 g range and 0.39 g resolution.

Conclusions:

• Paper is a viable and cost-effective structural material for developing MEMS force sensors.
• The developed paper-based sensors offer a simple, rapid fabrication process suitable for disposable applications.
• These sensors show promise for diverse applications, including material characterization and low-cost weighing devices.