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Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials
Published on: March 23, 2017
Fabrication of split-ring resonators by tilted nanoimprint lithography
Liguo Gao1, Li Lin, Juanyuan Hao
1State Key Laboratory of Supramolecular Structure and Materials, College of Chemistry, Jilin University, Changchun, PR China.
Journal of Colloid and Interface Science
|May 20, 2011
Summary
A novel fabrication method combines tilted nanoimprint and nanotransfer imprinting to create large-area metallic split-ring arrays efficiently. This technique allows for adjustable feature sizes and patterning on curved surfaces using reusable molds.
Area of Science:
- Nanofabrication
- Materials Science
- Photonics
Background:
- Periodic metallic nanostructures are crucial for metamaterial applications.
- Scalable fabrication of these structures, especially on non-planar surfaces, remains a challenge.
Purpose of the Study:
- To develop an efficient and versatile fabrication technique for large-area periodic metallic split-ring arrays.
- To enable the patterning of these arrays on curved substrates.
Main Methods:
- Utilized a combination of tilted nanoimprint lithography and nanotransfer imprinting.
- Employed polydimethylsiloxane (PDMS) molds for flexibility and reusability.
- Adjusted feature size by modifying imprinting mold geometry parameters.
Main Results:
- Successfully fabricated large-area periodic metallic split-ring arrays.
- Demonstrated control over feature size through mold design.
- Achieved patterning on curved surfaces due to the flexible nature of PDMS molds.
- Confirmed reusability of molds without loss of fidelity.
Conclusions:
- The combined tilted nanoimprint and nanotransfer imprinting technique offers an efficient route for fabricating large-area metallic split-ring arrays.
- This method provides flexibility in feature size control and substrate compatibility, including curved surfaces.
- The reusability of molds enhances the cost-effectiveness and scalability of the fabrication process.
