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Updated: Jun 1, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
1.5-GHz voltage controlled oscillator with 3% tuning bandwidth using a two-pole DSBAR filter
Ivan Avramov1, Stephen R Gilbert, Rich Ruby
1Georgy Nadjakov Institute of Solid-State Physics, Bulgarian Academy of Sciences, Sofia, Bulgaria. iavramov@pronto.phys.bas.bg
This study introduces a novel voltage controlled oscillator (VCO) utilizing a miniature decoupled stacked bulk acoustic resonator (DSBAR) filter. The new VCO achieves excellent phase noise suppression and high power efficiency in the gigahertz range.
Area of Science:
- Electrical Engineering
- RF and Microwave Engineering
- Materials Science
Background:
- Voltage controlled oscillators (VCOs) are critical components in modern electronic systems.
- Achieving low phase noise and high power efficiency simultaneously remains a significant challenge.
- Miniature acoustic resonators offer potential for improved oscillator performance.
Purpose of the Study:
- To present the first results of a novel voltage controlled oscillator (VCO) operating in the lower gigahertz range.
- To demonstrate the performance benefits of incorporating a miniature decoupled stacked bulk acoustic resonator (DSBAR) filter within a VCO.
- To evaluate the phase noise suppression and power efficiency of the developed VCO prototypes.
Main Methods:
- Design and fabrication of a novel VCO incorporating a miniature two-pole decoupled stacked bulk acoustic resonator (DSBAR) filter.
- Characterization of the DSBAR filter's properties, including phase transition, linearity, and insertion loss.
- Testing of 1.55-GHz laboratory VCO prototypes to measure supply voltage, current, output power, efficiency, and phase noise.
Main Results:
- The novel DSBAR filter enables stable single-mode operation over a 45 MHz tuning bandwidth with negligible heat dissipation.
- Laboratory VCO prototypes achieved a 5 V supply voltage, 50 mA supply current, and 15 dBm output power.
- Demonstrated phase noise suppression of -84 dBc/Hz at 1 kHz carrier offset and < -180 dBc/Hz in the thermal noise region.
- Achieved power efficiency greater than 13%.
Conclusions:
- The integration of the DSBAR filter into a VCO design significantly improves phase noise performance and power efficiency.
- The developed VCOs show promising results for applications requiring high-performance frequency generation.
- Cascading DSBAR filters offers a pathway for further reduction of phase noise in future oscillator designs.
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