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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
10:39

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics

Published on: August 5, 2020

A single vibration mode tubular piezoelectric ultrasonic motor

Siyuan He1, Paul R Chiarot, Soonho Park

  • 1Department of Mechanical and Industrial Engineering, Ryerson University, Toronto, ON, Canada. s2he@ryerson.ca

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|May 31, 2011
PubMed

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