Updated: Jun 1, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Nur Ismail1, Fei Sun, Gabriel Sengo
1MESA + Institute for Nanotechnology, University of Twente, Enschede, The Netherlands. n.ismail@ewi.utwente.nl
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We developed a new arrayed-waveguide-grating (AWG) layout eliminating phase errors and reducing chip size by over 50% for high-order devices. Experimental results show high resolution and low losses, making it ideal for optical applications.
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