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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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Laser erasable implanted gratings for integrated silicon photonics.

Renzo Loiacono1, Graham T Reed, Goran Z Mashanovich

  • 1Advanced Technology Institute, University of Surrey, Guildford GU27XH, United Kingdom. enzo.loiacono@surrey.ac.uk

Optics Express
|June 7, 2011
PubMed
Summary

Researchers developed laser-erasable germanium-implanted Bragg gratings in silicon-on-insulator (SOI) waveguides. These gratings, formed by ion implantation and erased by laser treatment, offer a new pathway for reconfigurable integrated photonics.

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Area of Science:

  • Photonics and Optical Engineering
  • Materials Science and Engineering
  • Semiconductor Device Fabrication

Background:

  • Bragg gratings are crucial for controlling light in photonic integrated circuits.
  • Existing fabrication methods for Bragg gratings can be permanent, limiting device reconfigurability.
  • Ion implantation offers a pathway for modifying waveguide properties.

Purpose of the Study:

  • To experimentally demonstrate laser-erasable Bragg gratings in silicon-on-insulator (SOI) waveguides.
  • To investigate the fabrication and erasure mechanisms of germanium-implanted gratings.
  • To explore the potential for reconfigurable photonic devices.

Main Methods:

  • Fabrication of Bragg gratings in SOI waveguides via ion implantation-induced amorphization.
  • Erasure of gratings using contained laser thermal treatment.
  • Characterization of grating performance using transmission measurements.
  • Selective erasure using UV pulsed laser annealing.

Main Results:

  • Demonstrated Bragg gratings with an extinction ratio up to 24dB in transmission.
  • Achieved grating lengths up to 1000µm.
  • Successfully demonstrated selective erasure of gratings using UV pulsed laser annealing.

Conclusions:

  • Germanium-implanted Bragg gratings in SOI are laser erasable.
  • Laser annealing provides a method for controlled grating removal.
  • This technology enables a new class of laser-erasable devices for integrated photonics.
  • The findings pave the way for reconfigurable photonic circuits.