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Updated: May 31, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
Xiaozhu Zhou1, Freddy Boey, Fengwei Huo
1School of Materials Science and Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore.
This review covers micro- and nanometer-scale surface patterning techniques. It highlights scanning probe lithography (SPL) and dip-pen nanolithography (DPN), emphasizing biomolecule applications.
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