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Resonance is produced depending on the boundary conditions imposed on a wave. Resonance can be produced in a string under tension with symmetrical boundary conditions (i.e., has a node at each end). A node is defined as a fixed point where the string does not move. The symmetrical boundary conditions result in some frequencies resonating and producing standing waves, while other frequencies interfere destructively. Sound waves can resonate in a hollow tube, and the frequencies of the sound...
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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
09:46

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

Harmonic generation in silicon nitride ring resonators.

Jacob S Levy1, Mark A Foster, Alexander L Gaeta

  • 1School of Electrical and Computer Engineering, Cornell University, Ithaca, NY 14853, USA. jsl77@cornell.edu

Optics Express
|July 1, 2011
PubMed
Summary
This summary is machine-generated.

We achieved visible light generation using silicon nitride waveguides and ring resonators, enabling efficient second-harmonic generation with milliwatt powers. This demonstrates a new pathway for nonlinear optics in CMOS-compatible materials.

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Area of Science:

  • Photonics and optical engineering
  • Materials science
  • Nonlinear optics

Background:

  • Centrosymmetric materials typically lack second-order nonlinear optical (χ(2)) effects.
  • Integrated photonics relies on efficient nonlinear processes for light generation and manipulation.
  • Silicon nitride (Si3N4) is a CMOS-compatible material with potential for integrated photonic devices.

Purpose of the Study:

  • To demonstrate second- and third-harmonic generation in a centrosymmetric CMOS-compatible material.
  • To utilize nanoscale structuring and high-Q resonators to enhance nonlinear optical processes.
  • To achieve efficient visible light generation from telecom-wavelength input.

Main Methods:

  • Fabrication of integrated optical waveguides and ring resonators using silicon nitride (Si3N4) and silicon dioxide (SiO2).
  • Exploiting nanoscale waveguide geometry to break bulk symmetry and induce a nonlinear χ(2) response.
  • Employing high-Q ring resonator cavities to enhance optical field confinement and nonlinear process efficiency.
  • Utilizing phase matching through refractive index matching between fundamental and harmonic modes.

Main Results:

  • Demonstrated efficient second-harmonic generation (SHG) in the visible spectrum from milliwatt-level telecom input powers.
  • Observed third-harmonic generation (THG) arising from the intrinsic third-order nonlinear susceptibility (χ(3)) of Si3N4.
  • Achieved phase matching for both SHG and THG processes via engineered waveguide and resonator structures.
  • Showcased the CMOS-compatibility of the demonstrated nonlinear optical effects.

Conclusions:

  • Nanoscale structuring of centrosymmetric Si3N4 waveguides can effectively induce a second-order nonlinear optical response.
  • High-Q ring resonators significantly enhance the efficiency of nonlinear harmonic generation.
  • This work presents a viable route for integrated visible light generation using CMOS-compatible materials and fabrication processes.