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Updated: May 31, 2026

Fabrication Process of Silicone-based Dielectric Elastomer Actuators
Published on: February 1, 2016
1Caltech Micromachining Lab, California Institute of Technology, Pasadena, CA 91125, USA.
This study introduces a novel electrolysis-based microelectromechanical systems (MEMS) diaphragm actuator. This innovative device efficiently converts electrical energy to pneumatic energy, generating significant force and movement from a small size.
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