AFM image reconstruction for deformation measurements by digital image correlation

Area of Science:

• Materials Science
• Nanotechnology
• Metrology

Background:

• Atomic Force Microscopy (AFM) is crucial for micro/nano-scale surface characterization.
• Scanner drift in AFM introduces image distortions, limiting precise deformation measurements.
• Digital Image Correlation (DIC) is a powerful technique for analyzing material deformation.

Purpose of the Study:

• To address image distortion caused by AFM scanner drift.
• To develop a method for reconstructing AFM images for accurate DIC analysis.
• To enable reliable micro/nano-scale deformation measurements using AFM.

Main Methods:

• Developed a novel image reconstruction method using two AFM images scanned at 0° and 90°.
• Validated the reconstruction method through a zero-deformation test.
• Applied the reconstructed images to a buckling test of a thin plate under AFM.

Main Results:

• Successfully reconstructed AFM images, correcting for scanner drift-induced distortions.
• Demonstrated the feasibility of AFM image correlation on reconstructed images.
• Characterized the in-plane displacement field of a buckling plate with high accuracy.

Conclusions:

• The proposed AFM image reconstruction method effectively mitigates scanner drift.
• AFM image correlation can be reliably applied to micro/nano-scale deformation analysis with reconstructed images.
• This technique enhances the utility of AFM for precise mechanical characterization of materials.