Towards creation of iron nanodots using metastable atom lithography

A J Palmer1, M Baker, R T Sang

  • 1Centre for Quantum Dynamics, School of Science, Griffith University, Nathan, Queensland 4111, Australia.

Nanotechnology
|July 6, 2011
PubMed
Summary

New metastable neon-atom lithography creates iron structures for high-density data storage. This method shows potential for reducing feature sizes to enable dense dot arrays for advanced memory applications.

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