Batch fabrication of carbon nanotube bearings

Relative displacements between the atomically smooth, nested shells in multiwalled carbon nanotubes (MWNTs) can be used as a robust nanoscale motion enabling mechanism. Here, we report on a novel method suited for structuring large arrays of MWNTs into such nanobearings in a parallel fashion. By creating MWNT nanostructures with nearly identical electrical circuit resistance and heat transport conditions, uniform Joule heating across the array is used to simultaneously engineer the shell geometry via electric breakdown. The biasing approach used optimizes process metrics such as yield and cycle-time. We also present the parallel and piecewise shell engineering at different segments of a single nanotube to construct multiple, but independent, high density bearings. We anticipate this method for constructing electromechanical building blocks to be a fundamental unit process for manufacturing future nanoelectromechanical systems (NEMS) with sophisticated architectures and to drive several nanoscale transduction applications such as GHz-oscillators, shuttles, memories, syringes and actuators.