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Updated: May 31, 2026
Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing
Published on: March 7, 2018
Monoclinic β-MoO(3) nanosheets produced by atmospheric microplasma: application to lithium-ion batteries
Davide Mariotti1, Henrik Lindström, Arumugam Chandra Bose
1Nanoarchitectonics Research Centre, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan. Department of Microelectronic Engineering, Rochester Institute of Technology, Rochester (NY), USA.
Abstract:
Porous high surface area thin films of nanosheet-shaped monoclinic MoO(3) were deposited onto platinized Si substrates using patch antenna-based atmospheric microplasma processing. The films were characterized by high resolution transmission electron microscopy (HRTEM), scanning electron microscopy (SEM) and electrochemical analysis. The electrochemical analysis shows original redox peaks and high charge capacity, and also indicates a reversible electrochemical behaviour particularly beneficial for applications in Li-ion batteries. SEM shows that the films are highly porous and consist of nanosheets 50-100 nm thick with surface dimensions in the micrometre range. HRTEM reveals that the MoO(3) nanosheets consist of the monoclinic beta phase of MoO(3). These intricate nanoarchitectures made of monoclinic MoO(3) nanosheets have not been studied previously in the context of applications in Li-ion batteries and show superior structural and morphological features that enable effective insertion of Li ions.
