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Imaging Corrosion at the Metal-Paint Interface Using Time-of-Flight Secondary Ion Mass Spectrometry

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Published on: May 6, 2019

Simulation of ion imaging: sputtering, contrast, noise.

V Castaldo¹, C W Hagen, P Kruit

¹Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands. v.castaldo@tudelft.nl

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Summary

Scanning ion microscopy (SIM) image interpretation is complex. A new simulation approach considers sputtering, contrast, and signal-to-noise ratio for better analysis of ion imaging tools.

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Last Updated: May 31, 2026

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Area of Science:

* Physics
* Materials Science
* Surface Science

Background:

* Scanning ion microscopy (SIM) has advanced with new light and inert gas ion sources.
* Interpreting SIM images is challenging due to different contrast mechanisms and sample sputtering.
* Existing Monte Carlo methods for simulating ion-sample interactions are computationally intensive.

Purpose of the Study:

* To develop a novel simulation approach for scanning ion microscopy imaging.
* To provide a more comprehensive method for evaluating SIM tools beyond single parameters.
* To improve the understanding of contrast, sputtering, and noise in SIM.

Main Methods:

* Simulation of image contrast using secondary electron yield curves versus incidence angle.
* Prediction of surface modification via sputtering yield curves.
* Incorporation of Poisson noise from primary ions and secondary electrons.
* Addition of detector noise contributions.

Main Results:

* Proposed simulation approach shows good agreement with experimental data for certain imaging aspects.
* Evaluation of SIM tools requires analysis of sputtering, contrast, and signal-to-noise ratio.
* Detector noise can be a limiting factor in focused ion beam imaging.

Conclusions:

* The proposed modular simulation approach offers a more robust evaluation of SIM performance.
* Further effects like edge enhancement can be integrated into the simulation framework.
* This method aids in optimizing SIM techniques and interpreting complex ion images.