Design of the double-telecentric high-aperture diffractive-refractive objectives
Grigoriy I Greisukh1, Evgeniy G Ezhov, Il'ya A Levin
1Penza State University of Architecture and Construction, 28 Titov Street, 440028 Penza, Russia. grey@pguas.ru
Applied Optics
|July 12, 2011
Abstract:
The possibility for achieving optical performance of objectives, including a minimum amount of diffractive lenses, comparable to optical performance of multiple-lens conventional objectives for nanolithography, is considered. The problem of chromatism connected with using excimer lasers is solved by applying aspheric substrates that help to reduce both axial color and spherochromatic aberration.
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