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Grigoriy I Greisukh1, Evgeniy G Ezhov, Il'ya A Levin
1Penza State University of Architecture and Construction, 28 Titov Street, 440028 Penza, Russia. grey@pguas.ru
This study explores using fewer diffractive lenses in nanolithography objectives to match conventional multi-lens performance. Aspheric substrates effectively correct chromatic aberration from excimer lasers.
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