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IR Spectrometers

IR Spectrometers

There are two main infrared (IR) spectrophotometers: dispersive IR spectrometers and Fourier transform infrared (FTIR) spectrometers. In a dispersive IR spectrometer, a beam of infrared radiation produced by a hot wire is divided into two parallel equal-intensity beams using mirrors. One beam passes through the sample, while another is a reference beam. The beams then move through the monochromator, which separates the radiations into a continuous spectrum of different frequencies. The...

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Related Experiment Video

Updated: May 31, 2026

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating

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Published on: October 11, 2016

Sensitivity enhancement of grating interferometer based two-dimensional sensor arrays using two-wavelength readout.

Onur Ferhanoglu¹, Hakan Urey

¹Department of Electrical Engineering, Optical Microsystems Laboratory, Koç University, Sarıyer, Istanbul 34450, Turkey.

|July 12, 2011

Summary

This study enhances displacement measurement sensitivity for microelectromechanical systems (MEMS) sensor arrays using a two-wavelength readout method. This technique improves sensitivity by approximately 30% for large-scale parallelized sensor systems.

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Last Updated: May 31, 2026

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Area of Science:

Optics and Photonics
Microelectromechanical Systems (MEMS)
Sensor Technology

Background:

Microelectromechanical systems (MEMS) sensors with diffraction gratings provide subnanometer displacement measurement sensitivity.
Interferometric readout sensitivity can decrease due to the gap between the grating and reference surface.
A two-wavelength (2-λ) readout method has shown potential for enhancing displacement measurement capabilities.

Purpose of the Study:

To demonstrate sensitivity enhancement in a large-scale parallelized sensor array (~20,000 sensors) using a two-wavelength readout method.
To develop a statistical model for sensitivity enhancement in grating-based sensor arrays.
To validate the proposed method experimentally using a thermal sensor array.

Main Methods:

Utilized a two-wavelength (633 nm and 650 nm) laser illumination system for a thermal sensor array.
Acquired time-sequential, backside illumination of the sensor array.
Imaged the first-order diffracted light onto a single CCD camera for target scene reconstruction.
Merged data from dual-wavelength measurements by selecting the maximum CCD signal relative to a reference image for each sensor.

Main Results:

Achieved approximately a 30% increase in average sensitivity for a 160x120 pixel infrared (IR) sensor array.
Demonstrated the effectiveness of the statistical representation in modeling sensitivity enhancement.
Validated the two-wavelength readout method on a large-scale parallelized sensor array.

Conclusions:

The two-wavelength readout method significantly enhances displacement measurement sensitivity in MEMS sensor arrays.
The proposed architecture and statistical model are applicable to various sensing applications requiring improved displacement measurements.
This approach offers a pathway for enhanced sensitivity in parallel biosensing and atomic force microscopy.