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Updated: May 31, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Yen-Sheng Lu1, Ling-Yu Tsai, Kuo-Cheng Huang
1Institute of Electronics Engineering, National Tsing Hua University, Hsinchu, Taiwan.
A novel 25-pixel illumination system uses dielectric liquid-lenses (DLL) and LEDs for 3D light field control. This system achieves high accuracy in simulations and corrects distorted light patterns, demonstrating its practical application.
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