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Fabrication and Testing of Microfluidic Optomechanical Oscillators
Published on: May 29, 2014
Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution
1Department of Physics, Universitat de les Illes Balears, Palma (Illes Balears), 07122, Spain. jaume.verd@uib.es
Lab on a Chip
|July 13, 2011
Abstract:
Water vapor sensing characterization of a metal resonator fabricated with an industrial 0.35 μm CMOS technology is reported. The resonator frequency is ∼13.2 MHz and exhibits a sensitivity magnitude of ∼3.5 kHz per %RH without requiring any additional hygroscopic coating layer. An on-chip integrated oscillator circuit enables an unprecedented resolution of 0.005 %RH.
