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Local electrical modification of a conductivity-switching polyimide film formed by molecular layer deposition

Shinya Yoshida1, Takahito Ono, Masayoshi Esashi

  • 1WPI Advanced Institute for Materials Research, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku, Sendai 980-8579, Japan. s-yoshida@mems.mech.tohoku.ac.jp

Nanotechnology
|July 27, 2011
PubMed

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