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Updated: May 30, 2026

Fabricating Nanogaps by Nanoskiving
Published on: May 13, 2013
Easy fabrication of electrically insulating nanogaps by transfer printing
Omar Fakhr1, Philipp Altpeter, Khaled Karrai
1attocube systems AG, Königinstr. 11a RGB, 80539, Munich, Germany; Lehrstuhl für Nanoelektronik, Technische Universität München, Arcisstrasse 21, 80333, Munich, Germany. omar.fakhr@suss.com.
Abstract:
An easy and cost-effective method to reproducibly fabricate nanogaps over a large area is introduced. Gold is evaporated on low-aspect-ratio polydimethylsiloxane (PDMS) stamps at an angle of 60°. Afterwards, the stamp is brought into contact with a silicon/silicon dioxide substrate and subsequently peeled at rates varying from 1 to 3 mm s(-1), resulting in the fabrication of nanogaps between two gold electrodes. The fabrication of insulating nanogaps with a width down to 50 nm is demonstrated.

