A scanning probe-based pick-and-place procedure for assembly of integrated quantum optical hybrid devices

Integrated quantum optical hybrid devices consist of fundamental constituents such as single emitters and tailored photonic nanostructures. A reliable fabrication method requires the controlled deposition of active nanoparticles on arbitrary nanostructures with highest precision. Here, we describe an easily adaptable technique that employs picking and placing of nanoparticles with an atomic force microscope combined with a confocal setup. In this way, both the topography and the optical response can be monitored simultaneously before and after the assembly. The technique can be applied to arbitrary particles. Here, we focus on nanodiamonds containing single nitrogen vacancy centers, which are particularly interesting for quantum optical experiments on the single photon and single emitter level.