Nanoparticle formation in Au thin films by electron-beam-induced dewetting

We carried out investigations on electron-beam-induced nanoparticle formation in thin (5-30 nm) Au films on smooth SiO(2)/Si substrates. When the Au films were irradiated with an electron beam, the Au films broke up into nanoparticles through the dewetting process. The dominant wavelengths of the surface (corresponding to the pitch between nanoparticles) were closely related with the thickness of the Au. We then developed a new technique for the formation of periodically arranged Au nanoparticles using a holed substrate. The nanoholes induced heterogeneous nucleation and helped to form ordered nanoparticles between the holes. Two-dimensionally, periodically arranged Au nanoparticles with a pitch of 100 nm were obtained.