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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Tat Joo Teo1, I-Ming Chen, Guilin Yang
1School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore. Singapore Institute of Manufacturing Technology, Agency for Science Technology and Research, Singapore.
A novel flexure-based electromagnetic linear actuator (FELA) offers large displacement and high force for precise motion. This technology enables ultra-high precision layer-over-layer fabrication in nano-imprinting.
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