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Updated: May 30, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Quantitative statistical analysis, optimization and noise reduction of atomic resolved electron energy loss spectrum
K J Dudeck1, M Couillard, S Lazar
1Department of Materials Science and Engineering, McMaster University, Hamilton L8S 4L7, Canada.
Abstract:
In this work we investigate methods of statistical processing and background fitting of atomic resolution electron energy loss spectrum image (SI) data. Application of principal component analysis to SI data has been analyzed in terms of the spectral signal-to-noise ratio (SNR) and was found to improve both the spectral SNR and its standard deviation over the SI, though only the latter was found to improve significantly and consistently across all data sets analyzed. The influence of the number of principal components used in the reconstructed data set on the SNR and resultant elemental maps has been analyzed and the experimental results are compared to theoretical calculations.
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