Study of gaseous interactions in carbon nanotube field-effect transistors through selective Si(3)N(4) passivation

Ning Peng1, Qing Zhang, Ooi Kiang Tan

  • 1Microelectronics Center, School of Electrical and Electronic Engineering, Nanyang Technological University, 639798, Singapore.

Nanotechnology
|August 13, 2011
PubMed

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