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Updated: May 30, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Guided mode resonance in subwavelength metallodielectric free-standing grating for bandpass filtering
Emilie Sakat1, Grégory Vincent, Petru Ghenuche
1ONERA The French Aerospace Lab, Chemin de la Hunière, F-91760 Palaiseau, France.
Abstract:
We present the experimental study of a free-standing metallic guided-mode resonant structure, for bandpass filtering applications in the mid-IR wavelength range. Structure consists of a subwavelength gold grating with narrow slits deposited on a silicon nitride membrane. High optical transmission is measured with up to 78% transmission at resonance. Angularly resolved spectra are presented revealing Fano-type resonance.
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