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Updated: May 29, 2026

Tree Core Analysis with X-ray Computed Tomography
Published on: September 22, 2023
Toward quantitative core-loss EFTEM tomography
N Y Jin-Phillipp1, C T Koch, P A van Aken
1Stuttgart Center for Electron Microscopy, Max-Planck-Institut für Metallforschung, Heisenbergstr. 3, 70569 Stuttgart, Germany. nyjin@mf.mpg.de
Abstract:
Core-loss EFTEM tomography provides three-dimensional structural and chemical information. Multiple inelastic scattering occurring in thick specimens as well as orientation-dependent diffraction contrast due to multiple elastic scattering, however, often limit its applications. After demonstrating the capability of core-loss EFTEM tomography to reconstruct just a few monolayers thin carbon layer covering a Fe catalyst particle we discuss its application to thicker samples. We propose an approximate multiple-scattering correction method based on the use of zero-loss images and apply it successfully to copper whiskers, providing a significant improvement of the reconstructed 3D elemental distribution. We conclude this paper by a general discussion on experimental parameters affecting the accuracy of EFTEM 3D elemental mapping.
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