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Related Experiment Video

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Tree Core Analysis with X-ray Computed Tomography

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Published on: September 22, 2023

Toward quantitative core-loss EFTEM tomography.

N Y Jin-Phillipp¹, C T Koch, P A van Aken

¹Stuttgart Center for Electron Microscopy, Max-Planck-Institut für Metallforschung, Heisenbergstr. 3, 70569 Stuttgart, Germany. nyjin@mf.mpg.de

Ultramicroscopy

|August 26, 2011

Summary

Energy-filtered transmission electron microscopy (EFTEM) tomography offers 3D chemical mapping. A new correction method improves 3D elemental distribution accuracy in thicker samples, overcoming scattering limitations.

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Area of Science:

Materials Science
Microscopy
Nanotechnology

Background:

Core-loss EFTEM tomography is a powerful technique for 3D structural and chemical analysis.
Applications are often limited by multiple scattering in thick specimens and diffraction contrast.

Purpose of the Study:

To demonstrate the capability of core-loss EFTEM tomography for thin layer reconstruction.
To develop and validate a multiple-scattering correction method for thicker samples.
To discuss experimental parameters influencing EFTEM 3D elemental mapping accuracy.

Main Methods:

Demonstrated core-loss EFTEM tomography on a few-monolayer carbon layer over Fe catalyst.
Proposed and applied an approximate multiple-scattering correction using zero-loss images.
Tested the method on copper whiskers to assess 3D elemental distribution.

Main Results:

Successfully reconstructed a thin carbon layer on an Fe catalyst.
The multiple-scattering correction significantly improved 3D elemental distribution in copper whiskers.
The method enhances the accuracy of EFTEM 3D elemental mapping.

Conclusions:

Core-loss EFTEM tomography is viable for thin layer analysis.
The proposed correction method effectively mitigates scattering artifacts in thicker samples.
Optimizing experimental parameters is crucial for accurate 3D elemental mapping with EFTEM.