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Updated: May 29, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Akio Uesaka1, Kouichi Hayashi, Tomohiro Matsushita
1Tohoku Techno Arch Company, Limited, Sendai 980-8577, Japan.
Internal-detector electron holography, a novel technique, visualizes 3D atomic structures. This method successfully imaged strontium titanate (SrTiO3) atoms, including light elements, with high clarity.
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