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Micromirror with large-tilting angle using Fe-based metallic glass.

Jae-Wung Lee1, Yu-Ching Lin, Neelam Kaushik

  • 1World Premier International Research Center Advanced Institute for Materials Research, Tohoku University, Sendai, Tohoku, Japan. dlwodnd77@mems.mech.tohoku.ac.jp

Optics Letters
|September 3, 2011
PubMed
Summary
This summary is machine-generated.

Fe-based metallic glass (MG) enhances micromirror performance. MG torsion bars enable extremely large tilting angles over -270°, improving stability and actuation for MEMS devices.

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Area of Science:

  • Materials Science
  • Mechanical Engineering
  • MEMS Technology

Background:

  • Micromirrors are crucial MEMS devices requiring enhanced stability and tilting angles.
  • Traditional torsion bar materials often limit micromirror performance.
  • Fe-based metallic glass (MG) offers unique properties for advanced MEMS applications.

Purpose of the Study:

  • To investigate the use of Fe-based metallic glass for micromirror torsion bars.
  • To evaluate the impact of MG on micromirror tilting angle and stability.
  • To demonstrate enhanced performance through magnetic actuation.

Main Methods:

  • Fabrication of a micromirror with Fe-based MG torsion bars (250 μm length, 30 μm width, 2.5 μm thickness).
  • Testing tilting angles using permanent magnets (0.2 T) and an electromagnet setup (1.1 mT, 93 mA).
  • Characterization of MG properties including elastic strain limit, fracture toughness, and magnetic properties.

Main Results:

  • Achieved an extremely large tilting angle exceeding -270° with permanent magnet actuation.
  • Obtained a large mechanical tilting angle exceeding -70° with electromagnet actuation.
  • Demonstrated the significant contribution of the MG torsion bar's properties to the large tilting angles.

Conclusions:

  • Fe-based metallic glass is a highly effective material for micromirror torsion bars.
  • The large elastic strain limit, fracture toughness, and magnetic properties of MG enable superior tilting angles.
  • This advancement holds potential for next-generation MEMS devices requiring high-performance actuation.