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Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
An international round-robin calibration protocol for nanoindentation measurements
M Cabibbo1, P Ricci, R Cecchini
1Dipartimento di Ingegneria Industriale e Scienze Matematiche, Università Politecnica delle Marche, Via Brecce Bianche, 60131 Ancona, Italy. m.cabibbo@univpm.it
Micron (Oxford, England : 1993)
|September 6, 2011
Summary
Standardized nanoindentation calibration and data analysis procedures significantly reduce variability in hardness and elastic-plastic property measurements across different instruments. This ensures more reliable material characterization for coatings and thin films.
Area of Science:
- Materials Science
- Mechanical Engineering
- Nanotechnology
Background:
- Nanoindentation is crucial for evaluating material properties like hardness and elastic-plastic behavior.
- Commercial nanoindenters use instrument-specific software for data analysis, often via the Oliver and Pharr method.
- Calibration of compliance and area function is essential for accurate nanoindentation measurements.
Purpose of the Study:
- To develop and validate a standardized calibration and raw data analysis procedure for multiple nanoindentation instruments.
- To assess the effectiveness of a common procedure in reducing data variability compared to instrument-specific methods.
- To provide recommendations for improving the intercomparability of nanoindentation data.
Main Methods:
- Conducted round-robin experiments using six different nanoindentation instruments.
- Employed Berkovich, cube corner, and spherical indenters on fused quartz, polycarbonate, and sapphire reference samples.
- Applied a common calibration procedure and raw data analysis approach across all instruments.
Main Results:
- The standardized procedure consistently reduced the spread in hardness and reduced Young's modulus data.
- Variability was lower compared to measurements using instrument-specific analysis methods.
- Identified key parameters influencing data reliability, such as indenter type, penetration depth, and thermal drift.
Conclusions:
- A unified calibration and data analysis protocol is vital for intercomparable nanoindentation results.
- Recommendations include using sharp indenters, defining depth cut-offs, controlling thermal drift, and employing functional stiffness calibration.
- Adopting a unique protocol limits instrument-specific data spread, enhancing the reliability of hardness (H) and reduced Young's modulus (E(r)) data.
