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Note: High speed optical profiler based on a phase-shifting technique using frequency-scanning lasers.

Jong-Ahn Kim1, Chu-Shik Kang, Jonghan Jin

  • 1Center for Length, Korea Research Institute of Standards and Science, Yuseong-gu, Daejeon, South Korea.

The Review of Scientific Instruments
|September 8, 2011
PubMed
Summary
This summary is machine-generated.

A new high speed optical profiler (HSOP) uses frequency-scanning lasers for rapid 3D microscopic measurements. This advanced profiler achieves high accuracy and speed, suitable for industrial inline inspection.

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Area of Science:

  • Metrology
  • Optical Engineering
  • Nanotechnology

Background:

  • Accurate 3D profile measurements are crucial for microscopic structures in advanced manufacturing.
  • Existing optical profilers often face limitations in measurement speed and compactness.
  • High-speed inline inspection is essential for industries like semiconductor and flat-panel display manufacturing.

Purpose of the Study:

  • To develop a high speed optical profiler (HSOP) for rapid 3D profile measurements of microscopic structures.
  • To enhance existing HSOP techniques by incorporating frequency-scanning lasers and a compact interferometer.
  • To validate the HSOP's performance against commercial profilers and assess its suitability for industrial applications.

Main Methods:

  • Development of frequency-scanning lasers tailored for HSOP applications.
  • Design and implementation of a compact microscopic interferometer.
  • Modification of the HSOP controller for precise phase-shifting steps.
  • Comparative measurements of step height specimens using the developed HSOP and a commercial optical profiler.

Main Results:

  • The HSOP achieved measurement speeds up to 30 Hz, significantly higher than conventional methods.
  • Step height measurement repeatability was demonstrated to be less than 1 nm.
  • Performance was comparable to a commercial optical profiler, validating its accuracy.
  • Measurements of microscopic structures confirmed the HSOP's capability for high-speed inline inspection.

Conclusions:

  • The developed HSOP offers a significant advancement in high-speed 3D metrology for microscopic structures.
  • Its high speed and accuracy make it a promising tool for inline inspection in the semiconductor and flat-panel display industries.
  • The integration of frequency-scanning lasers and a compact interferometer provides a robust and efficient measurement solution.