Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Experiment Video

Updated: May 29, 2026

Atomically Traceable Nanostructure Fabrication
12:35

Atomically Traceable Nanostructure Fabrication

Published on: July 17, 2015

Modeling the point-spread function in helium-ion lithography.

Donald Winston1, J Ferrera, L Battistella

  • 1Massachusetts Institute of Technology, Cambridge, Massachusetts, USA. dwinston@mit.edu

Scanning
|September 23, 2011
PubMed
Summary
This summary is machine-generated.

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Developments and applications of the OPTIMADE API for materials discovery, design, and data exchange.

Digital discovery·2024
Same author

Resonating Electrostatically Guided Electrons.

Physical review letters·2024
Same author

Single-photon detection in the mid-infrared up to 10 <i>μ</i>m wavelength using tungsten silicide superconducting nanowire detectors.

APL photonics·2023
Same author

Single-photon detection using high-temperature superconductors.

Nature nanotechnology·2023
Same author

Unifying the identification of biomedical entities with the Bioregistry.

Scientific data·2022
Same author

Challenges in Bioinformatics Workflows for Processing Microbiome Omics Data at Scale.

Frontiers in bioinformatics·2022
Same journal

Retracted: Diagnostic Efficacy of CT Radiomic Features in Pulmonary Invasive Mucinous Adenocarcinoma.

Scanning·2023
Same journal

Retracted: 3D Convolutional Neural Network Framework with Deep Learning for Nuclear Medicine.

Scanning·2023
Same journal

Retracted: Observation on the Effect of MRI Image Scanning on Knee Pain in Football Injury.

Scanning·2023
Same journal

Retracted: Optimal Cellular Microscopic Pattern Recognizer- (OCMPR-) Based Wireless Detection Network for Efficiently Leveraging the Parallel Distributed Processing Capabilities.

Scanning·2023
Same journal

Retracted: Changes of Volume Parameters in the Treatment of Graves Ophthalmopathy by Endoscopic Transethmoidal Decompression of the Orbital Inner Wall Combined with Fat Decompression.

Scanning·2023
Same journal

Retracted: Diagnostic Value of Specialist Systems in Sports Knee Injuries.

Scanning·2023
See all related articles

This study introduces a hybrid model for helium-ion lithography, combining SRIM software and secondary electron simulations. The findings reveal that energy deposition in resist is more complex than a simple Gaussian distribution.

Area of Science:

  • Lithography and Nanofabrication
  • Computational Physics
  • Materials Science

Background:

  • Helium-ion lithography offers high resolution but requires accurate modeling for process optimization.
  • Existing simulation methods may not fully capture the complex interactions of helium ions and secondary electrons within resist materials.

Purpose of the Study:

  • To develop and validate a hybrid modeling approach for helium-ion lithography.
  • To accurately simulate the spatial distribution of energy deposition in resist materials.
  • To investigate the point spread function in helium-ion lithography.

Main Methods:

  • A hybrid approach combining Stopping and Range of Ions in Matter (SRIM) software for ion trajectories and Monte Carlo simulations for secondary electron trajectories.

More Related Videos

Determination of the Excitation and Coupling Rates Between Light Emitters and Surface Plasmon Polaritons
07:39

Determination of the Excitation and Coupling Rates Between Light Emitters and Surface Plasmon Polaritons

Published on: July 21, 2018

Related Experiment Videos

Last Updated: May 29, 2026

Atomically Traceable Nanostructure Fabrication
12:35

Atomically Traceable Nanostructure Fabrication

Published on: July 17, 2015

Determination of the Excitation and Coupling Rates Between Light Emitters and Surface Plasmon Polaritons
07:39

Determination of the Excitation and Coupling Rates Between Light Emitters and Surface Plasmon Polaritons

Published on: July 21, 2018

  • Tracing helium-ion paths using SRIM and simulating secondary electron generation and propagation.
  • Comparing simulation results with experimental data.

    • Main Results:

    • The spatial distribution of energy deposition, or point spread function, is not a simple sum of Gaussian functions.
    • The hybrid model accurately predicts energy deposition profiles.
    • Simulations and experiments show deviations from simple Gaussian models.

    Conclusions:

    • The developed hybrid model provides a more accurate representation of energy deposition in helium-ion lithography.
    • Understanding the non-Gaussian nature of the point spread function is crucial for advancing high-resolution lithography.
    • This approach enhances the predictive capability for helium-ion lithography processes.