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Updated: May 28, 2026
Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor
Published on: August 30, 2012
Tiny surface plasmon resonance sensor integrated on silicon waveguide based on vertical coupling into finite
Dong-Jin Lee1, Hae-Dong Yim, Seung-Gol Lee
1Department of Information and Communication Engineering, Inha University, 253, Yonghyun-dong, Nam-gu, Incheon 402-751, South Korea.
Abstract:
We propose a tiny surface plasmon resonance (SPR) sensor integrated on a silicon waveguide based on vertical coupling into a finite thickness metal-insulator-metal (f-MIM) plasmonic waveguide structure acting as a Fabry-Perot resonator. The resonant characteristics of vertically coupled f-MIM plasmonic waveguides are theoretically investigated and optimized. Numerical results show that the SPR sensor with a footprint of ~0.0375 μm2 and a sensitivity of ~635 nm/RIU can be designed at a 1.55 μm transmission wavelength.
