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Updated: May 28, 2026

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
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Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology

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Integrated carbon nanotube array as dry adhesive for high-temperature silicon processing

Youngkee Eun1, Jae-Ik Lee, Jungwook Choi

  • 1School of Mechanical Engineering, Yonsei University, Seoul, Republic of Korea.

Advanced Materials (Deerfield Beach, Fla.)
|November 1, 2011
PubMed
Summary

No abstract available in PubMed .

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