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Updated: May 28, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

Field programmable gate array based reconfigurable scanning probe/optical microscope.

Derek B Nowak¹, A J Lawrence, Zechariah K Dzegede

¹Department of Physics, Portland State University, Portland, Oregon 97207, USA.

The Review of Scientific Instruments

|November 4, 2011

Summary

This summary is machine-generated.

Researchers developed a versatile microscopy platform for nanometrology and nanospectroscopy. This customizable system enables various imaging techniques with high sensitivity, adaptable for diverse research applications.

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Area of Science:

Nanotechnology
Optical Microscopy
Spectroscopy

Background:

Nanometrology and nanospectroscopy demand advanced analytical systems.
Existing microscopy tools often lack flexibility for diverse research needs.

Purpose of the Study:

To develop a versatile and customizable microscopy platform.
To enable advanced imaging and spectroscopic capabilities for nanoscale research.

Main Methods:

Development of a modular microscopy platform controlled by an FPGA and a single computer.
Integration of near-field, far-field fluorescence, and shear force microscopy.
Adaptability for Kerr magneto-optical (MO), Raman, and super-resolution techniques.

Main Results:

Demonstrated near-field and far-field fluorescence imaging with single-molecule sensitivity.
Successful adaptation for various optical imaging and spectroscopic methods.
Simultaneous topographic monitoring alongside optical imaging.

Conclusions:

The developed platform offers a highly versatile and customizable solution for advanced nanometrology and nanospectroscopy.
The system's modularity and adaptability facilitate diverse research applications.
Cost-effective design using off-the-shelf components enables broader accessibility.