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Updated: May 27, 2026

Investigating the Potential of Singly Curved Thin Piezoelectric Transducers for Energy Harvesting and Structural Health Monitoring
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Giant piezoelectricity on Si for hyperactive MEMS.

S H Baek1, J Park, D M Kim

  • 1Department of Materials Science and Engineering, University of Wisconsin, Madison, WI 53706, USA.

Science (New York, N.Y.)
|November 19, 2011
PubMed
Summary

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We developed advanced microelectromechanical systems (MEMS) using lead magnesium niobate-lead titanate (PMN-PT) thin films. These MEMS offer superior piezoelectric performance for diverse applications like energy harvesting and medical imaging.

Area of Science:

  • Materials Science
  • Electrical Engineering
  • Nanotechnology

Background:

  • Microelectromechanical systems (MEMS) with piezoelectric layers enable integrated sensing and actuation.
  • Integrating high-performance piezoelectric materials like lead magnesium niobate-lead titanate (PMN-PT) into MEMS has been a significant challenge.
  • Existing MEMS often lack the giant piezoelectric response needed for advanced applications.

Purpose of the Study:

  • To synthesize high-quality PMN-PT epitaxial thin films on silicon substrates.
  • To overcome limitations in integrating giant piezoelectric materials into MEMS devices.
  • To demonstrate the potential of these heterostructures for enhanced device performance.

Main Methods:

  • Epitaxial growth of PMN-PT thin films on vicinal (001) silicon wafers using a (001) SrTiO3 template layer.

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  • Fabrication of microcantilever devices incorporating the PMN-PT thin films.
  • Characterization of piezoelectric coefficients and electromechanical coupling.

    • Main Results:

    • Achieved superior piezoelectric coefficients (e(31,f) = -27 ± 3 C/m²) in PMN-PT thin films.
    • Demonstrated microcantilever actuation at extremely low drive voltages.
    • Observed large electromechanical coupling comparable to bulk PMN-PT single crystals.

    Conclusions:

    • Successfully integrated giant piezoelectric PMN-PT thin films into MEMS.
    • These heterostructures offer a pathway to highly efficient piezoelectric MEMS.
    • Potential applications include ultrasound imaging, microfluidics, sensing, and energy harvesting.