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New volatile strontium and barium imidazolate complexes for the deposition of group 2 metal oxides
John A T Norman1, Melanie Perez, M S Kim
1Air Products and Chemicals, 1969 Palomar Oaks Way, Carlsbad, California 92011, USA. normanja@airproducts.com
Abstract:
We report the synthesis, characterization, and experimental density function theory-derived properties of new volatile strontium and barium imidazolate complexes, which under atomic layer deposition conditions using ozone as a reagent can deposit crystalline strontium oxide at 375 °C.
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